MEMS & NEMS

Nanotechnology integrated to microtechnologies presents a completely new spectrum of opportunities for building devices, components and systems. The theoretical understanding of the integration forms the basis for 3D design and modelling of nanostructured composite materials and for the utilised structures to produce functionality in components. Materials and processing methods have to have crystallographic and electric analysis and characterisation in nanoscale and in macroscale. Integration technologies such as ceramics, silicon and polymer can be utilized as a versatile platform for a packaged system.

Focus areas:

Printed electronics and optics, biosensors
Optical measurement & integrated micro modules
Development of processes compatible with conventional microelectronics production to enable the manufacture of functional nanostructures
Design, fabrication and testing of micro- and nanosystems
Integration of nanostructures in printed electronics and micromodules